Surface loss probability of atomic hydrogen for different electrode cover materials investigated in H2-Ar low-pressure plasmas

TitelSurface loss probability of atomic hydrogen for different electrode cover materials investigated in H2-Ar low-pressure plasmas
MedientypJournal Article
Year of Publication2014
AutorenM. Sode, T. Schwarz-Selinger, W. Jacob, H. Kersten
JournalJournal of Applied Physics
Volume116
Problem1
Pagination013302
Date PublishedJul-07-2014
ISSN0021-8979
DOI10.1063/1.4886123
Short TitleJ. Appl. Phys.