Wall loss of atomic nitrogen determined by ionization threshold mass spectrometry

TitelWall loss of atomic nitrogen determined by ionization threshold mass spectrometry
MedientypJournal Article
Year of Publication2014
AutorenM. Sode, T. Schwarz-Selinger, W. Jacob, H. Kersten
JournalJournal of Applied Physics
Volume116
Problem19
Pagination193302
Date PublishedSep-11-2014
ISSN0021-8979
DOI10.1063/1.4902063
Short TitleJ. Appl. Phys.