MicroChamber

The MicroChamber is a small industrial low pressure chamber equipped with a magnetron to generate a micowave driven plasma. It is mostly used for polymer surface treatment experiments, such as surface activation, cleaning and thin film deposition. For diagnostics optical emission spectroscopy (OES), Langmuir and passive thermal probes (PTP), as well as water contact angle measurements (WCA) on the substrates have been applied. In the future this chamber will be mainly used for teaching purposes.