Wall loss of atomic nitrogen determined by ionization threshold mass spectrometry

TitleWall loss of atomic nitrogen determined by ionization threshold mass spectrometry
Publication TypeJournal Article
Year of Publication2014
AuthorsM. Sode, T. Schwarz-Selinger, W. Jacob, H. Kersten
JournalJournal of Applied Physics
Volume116
Issue19
Pagination193302
Date PublishedSep-11-2014
ISSN0021-8979
DOI10.1063/1.4902063
Short TitleJ. Appl. Phys.