Title | Wall loss of atomic nitrogen determined by ionization threshold mass spectrometry |
Publication Type | Journal Article |
Year of Publication | 2014 |
Authors | M. Sode, T. Schwarz-Selinger, W. Jacob, H. Kersten |
Journal | Journal of Applied Physics |
Volume | 116 |
Issue | 19 |
Pagination | 193302 |
Date Published | Sep-11-2014 |
ISSN | 0021-8979 |
DOI | 10.1063/1.4902063 |
Short Title | J. Appl. Phys. |